日本锇膜镀膜仪
在SEM或者FE-SEM研究领域,有时对导电膜层要求非常高,这时常规的金、铂等金属已经不能满足要求,相对而言金属锇的颗粒更小,膜层细腻平坦,即使几个纳米厚度的膜,膜层也会获得非常好的导电性。我们推出的OPC锇膜镀膜仪是一款划时代的镀膜仪器。
不同与常规的离子溅射和蒸镀的膜层加工,OPC锇膜镀膜仪采用了全新的四氧化锇气体压缩方式获得锇膜,质量更好,效率更高。不论是离子溅射还是蒸镀,当高倍观察时,膜层粒子本身的粒度过大带来的问题是不可避免的。而OPC锇膜镀膜仪很好的解决了这个问题。现在推荐两款锇膜镀膜仪,60A和80T,其中, 60A仅供扫描电镜制膜用
仪器参数:
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型号
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OPC-80T
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OPC-60A
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腔室
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Hard glass chamber: 160mm(OD)x105mm(H)
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Hard glass chamber: 120mm(OD)x73mm(H)
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膜厚
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a few - few dozen nm
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a few - few dozen nm
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样品台
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Two holes for 10mm dia SEM holder, Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder
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Seven holes for 10mm dia SEM holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM holder
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镀膜种类
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Osmium(OsO4)
C10H8(Naphthalene)
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Osmium
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锇储存
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Detachable, sealing up, has view port, is able to be stored in a freezer
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Detachable, sealing up, has view port, is able to be stored in a freezer
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Detachable, has view port
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气体输入
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OsO4 ampoule is split in an OsO4 reservoir and its sublimated gas is introduced into gas reactor chamber.
C10H8 is in an C10H8 reservoir and its sublimated gas is introduced into gas reactor chamber.
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OsO4 ampoule is split in an OsO4 reservoir and its subkimated gas is introduced into gas reactor chamber.
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电源
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AC100V 2A 200W(50/60Hz)
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AC100V 2A 200W(50/60Hz)
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尺寸
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450(w)x410(D)x390(H)mm
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450(w)x350(D)x330(H)mm
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重量
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Approx. 30kg
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Approx. 20kg
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订购信息
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货号
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产品描述
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规格
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OPC-60A
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锇膜镀膜仪Osmium Plasma Coater
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台
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OPC-80T
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锇膜镀膜仪Osmium Plasma Coater
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台
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